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Product Specifications

Product Description

The Michell Instruments Pura pure gas dew point transmitter is a self-contained hygrometer designed specifically to measure trace moisture content in ultra high purity gas applications such as semiconductor manufacturing, fiber optic production, optical coating processes, or pure gas production. The Pura transmitter offers a measurement range of -120 to -40°Cdp (-184°F to -40°Fdp) and is calibrated to -148 to -40°F (-100 to -40°C).

A hazardous area approval is available for the Pura when the 2-wire analog output is selected. The operating pressure must fall within 10⁻⁹ torr (10⁻⁷ Pa) and 240 barg (24 MPa) and the flow rate can be from 2.11 to 10.59 scfh (1 to 5 Nl/min). This dew point transmitter is available as a standalone sensor or with an optional sampling block. The 1/4in and 1/2in male VCR process connections ensure compatibility with high purity gas systems.

Key Features

  • Measurement range: -120 to -40°Cdp (-184 to -40°Fdp)
  • Calibrated from -100 to -40°C (-148 to -40°F)
  • Accuracy: up to ±1°C (±1.8°F)
  • Operating pressure: 10⁻⁹ torr to 240 barg
  • Flow rate: 1 to 5 Nl/min (2.11 to 10.59 scfh)
  • 2-wire, 4-20mA output
  • 1/4in and 1/2in male VCR process connections
  • Optional hazardous area approval
  • Standalone sensor or optional sampling block

Applications

  • Semiconductor manufacturing
  • Fiber optic production
  • Optical coating processes
  • Pure gas production
  • Ultra high purity gas monitoring
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Ultra High Purity Dew Point Transmitter - -120 to -40°Cdp | Michell Pura

Semiconductor grade
MPN/Series: Pura

Product Specifications

Manufacturer
Michell Instruments
Product Type
Ultra High Purity Dew Point Transmitter
Part Number
Pura
Measurement Range
-120 to -40°Cdp (-184 to -40°Fdp), calibrated -100 to -40°C (-148 to -40°F)
Accuracy
Up to ±1°C (±1.8°F)
Operating Pressure
10⁻⁹ torr to 240 barg (10⁻⁷ Pa to 24 MPa)
Flow Rate
2.11 to 10.59 scfh (1 to 5 Nl/min)
Output
2-wire, 4-20mA
Process Connections
1/4in & 1/2in male VCR
Configuration Options
Standalone sensor or with optional sampling block
Hazardous Area Approval
Optional when 2-wire analog output is selected
Documents
Product Manual, Product Specs
Ultra High Purity Dew Point Transmitter - -120 to -40°Cdp | Michell Pura