The Alicat Scientific MCS/MCRS series 316L aggressive gas compatible mass flow controllers retain the same functionality, fit, and finish of the standard Alicat line while providing enhanced chemical compatibility. Built from 316L stainless steel with encapsulated 316L sensors in the flow path and a variety of sealing materials including FFKM, EPDM, Viton, and Buna-n, these controllers are suitable for the most demanding gas applications.

Designed for simplicity, these mass flow controllers are easy to use with local display allowing configuration changes without computers, complicated software, or scripts. Standard accuracy is ±(0.8% of reading + 0.2% of full scale), with a high-accuracy calibration option up to ±(0.4% of reading + 0.2% of full scale). Very few moving parts with all internal components fixed in place ensures consistency and repeatability of ±0.2% of FS.

The MCS/MCRS series require very little power, reducing operating costs, and have lower pressure drop compared to similar devices, ensuring more process fluid reaches the application. They measure pressure, temperature, and volumetric flow in addition to mass flow, reducing the number of instruments required.

With response time of less than 10 milliseconds and control time of 100 milliseconds, these are among the fastest naturally responding mass flow controllers available. Multiple analog outputs and inputs are standard. Adding a totalizer allows monitoring cumulative media usage to identify waste. The modular design also supports flow control into vacuum applications.