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Product Specifications

Product Description

The Alicat Scientific MQ Series mass flow meters are designed for applications involving inlet pressures of up to 320 psia. Unlike traditional mass flow meters, they utilize laminar flow and differential pressure technology which results in extremely fast, accurate measurement with no warm-up time and unparalleled versatility.

Flow ranges are available from 0.5 standard cubic centimeters per minute to 4000 standard liters per minute full scale with a 50:1 turndown ratio. Basic accuracy is ±2.0% of full scale, with a response time of just 10 milliseconds. Calibrated and ready for use with 20 gases and 10 gas blends, the MQ series offers Gas Select allowing users to choose from 30 gases and gas blends via the display or RS-232 interface.

In addition to mass flow measurements, the MQ Series also measures pressure, temperature and volumetric flow, meaning fewer instruments to buy and install. All measured parameters are displayed in real time on the digital display, with any parameter selectable for center-screen focus. The push button interface allows easy configuration without computers or scripts.

The MQ series meter can be equipped with an Alicat 9V battery pack to serve as a stand-alone secondary calibration standard or flow verification meter. Multiple digital output options include RS-232 serial, RS-485 serial, Modbus, and PROFIBUS, with analog output options of 0-5 Vdc, 1-5 Vdc, 0-10 Vdc, or 4-20 mA.

Alicat Scientific

High Pressure Mass Flow Meter - 320 psia, 4000 SLPM | Alicat MQ Series

High inlet pressure flow meter
MPN/Series: MQ Series

Product Specifications

Manufacturer:Alicat Scientific

Product Type:High Pressure Mass Flow Meter

Part Number:MQ Series

Flow Ranges:0.5 SCCM to 4000 SLPM full scale

Maximum Inlet Pressure:320 psia

Accuracy:±2.0% of full scale

Turndown Ratio:50:1

Measurements:Mass flow, volumetric flow, pressure (PSIA), temperature

Technology:Laminar flow and differential pressure

Response Time:10 milliseconds

Gas Capability:20 gases and 10 gas blends, 30 user-selectable on-board gas calibrations

Digital Output Options:RS-232 serial, RS-485 serial, Modbus, PROFIBUS

Analog Output Options:0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 4-20 mA

Operating Temperature:-10 to 60°C

Features:No warm-up time, customizable units of measure, Gas Select via display or RS-232, optional battery pack for portability

Certification:NIST traceable

Documents: Product Manual, Product Specs