The Alicat Scientific MS series mass flow meters are designed for accurate, versatile, and dependable gas flow measurement, with 316L stainless steel construction making them particularly suitable for aggressive gases. They utilize laminar flow and differential pressure technology, resulting in extremely fast response with no warm-up time and exceptional versatility across a wide range of applications.

Flow ranges are available from 0.5 SCCM to 3000 SLPM with a 100:1 turndown ratio. Basic accuracy is ±0.8% of reading ±0.2% of full scale with ±0.2% FS repeatability and a 10-millisecond response time. The instruments are calibrated and ready for use with 20 gases and 10 gas blends, featuring Gas Select which allows users to select from 30 gases and gas blends via the display or RS-232 interface.

In addition to mass flow measurements, the MS series simultaneously measures pressure, temperature, and volumetric flow, reducing the number of instruments required. All measured parameters are displayed in real time on the digital display, with push button interface for easy configuration. The meters can be equipped with an optional 9V battery pack to serve as a stand-alone secondary calibration standard or flow verification meter.

The MS series is compatible with corrosive and aggressive gases including nitric oxide (100%), nitrogen trifluoride (100%), ammonia (100%), chlorine (100%), hydrogen sulfide (100%), sulfur dioxide (100%), propylene (100%), nitrogen dioxide (0.5% in inert carrier), and refrigerant gases (100%). Multiple communication options include RS-232, RS-485, PROFIBUS, DeviceNET, and various analog outputs.