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Product Specifications

Product Description

The Alicat Scientific M Series mass flow meters provide an accurate, versatile, dependable, and cost-effective solution for gas flow measurement. Unlike traditional thermal mass flow meters, M Series instruments utilize laminar flow and differential pressure technology, resulting in extremely fast response with no warm-up time and unparalleled versatility across a wide range of gases and flow conditions.

Flow ranges are available from 0.5 standard cubic centimeters per minute to 2000 standard liters per minute with an exceptional 200:1 turndown ratio, allowing accurate measurement at flows as low as 1/100th of the full-scale rating. Basic accuracy is ±0.8% of reading ±0.2% of full scale, with response time of just 10 milliseconds.

In addition to mass flow, the M Series simultaneously measures pressure, temperature, and volumetric flow—reducing the number of instruments required for comprehensive process monitoring. Instruments are calibrated and ready for use with 20 gases and 10 gas blends, with the Gas Select feature allowing users to switch between 30 gases and gas blends via the display or RS-232 interface without recalibration.

The meters are designed for stand-alone operation, with all measured parameters displayed in real time on the digital display. The push-button interface enables easy configuration without computers or complex software. Multiple analog outputs complement the RS-232 digital output. With the optional 9V battery pack, the M Series becomes a portable secondary calibration standard or flow verification meter. Alicat's patented technology features very few moving parts, with all internal components fixed in place, ensuring exceptional consistency and repeatability over long operational lifetimes.

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Mass Flow Meter - Laminar Flow, 200:1 Turndown | Alicat M Series

Multi-parameter gas flow meter
MPN/Series: M Series

Product Specifications

Manufacturer
Alicat Scientific
Product Type
Mass Flow Meter
Part Number
M Series
Technology
Laminar flow differential pressure (no moving parts)
Flow Ranges
0.5 SCCM to 2000 SLM
Turndown Ratio
200:1
Basic Accuracy
±0.8% of reading ±0.2% of full scale
Response Time
10 milliseconds
Warm-up Time
None
Measurements
Mass flow, volumetric flow, pressure (PSIA), temperature (°C)
Gas Capability
20 gases and 10 gas blends, user-selectable via display or RS-232
Outputs
Multiple analog outputs plus RS-232 digital
Display
Digital display showing all measured parameters in real-time, push-button interface
Optional
9V battery pack for stand-alone secondary calibration standard
Certification
NIST traceable
Mass Flow Meter - Laminar Flow, 200:1 Turndown | Alicat M Series