The Alicat Scientific MCQ series mass flow controllers are designed for applications involving inlet pressures up to 320 psia, taking the guesswork out of precision gas flow control. Designed for simplicity, these controllers feature a local display that permits configuration changes without computers, complicated software, or scripts.

Flow ranges are available from 0-10 sccm to 0-3000 slpm full scale with 50:1 turndown ratio. Basic accuracy is ±2.0% of full scale with a remarkably fast response time of just 10 milliseconds for measurement and 100 milliseconds for control. Instruments are calibrated and ready for use with 20 gases and 10 gas blends.

The MCQ series requires very little power, reducing operating costs, and has lower pressure drop compared to similar flow devices, ensuring more process fluid reaches the application rather than being consumed by measurement. In addition to mass flow, the MCQ series measures pressure, temperature, and volumetric flow, reducing the number of instruments required.

Adding a totalizer allows users to monitor cumulative media usage for waste identification. These controllers are also suitable for flow control into vacuum applications, with modular design accommodating vacuum-driven systems. Applications include fuel cell testing, vacuum coating, sputtering, process automation, semiconductor processing, micro electro mechanical systems (MEMs), solar cell manufacturing, and flame tip control.