The CAS Universal Solvent Circulation Heater provides a safe and efficient means of heating low flash point solvents such as EKC, ACT, and NMP used in semiconductor wet process systems . Both the heating elements and the solvent tube are cast into an aluminum mass, which transfers heat uniformly to the tube carrying the solvent.

A secondary chilled water tube is also cast-in, allowing rapid cooling of the casting for routine maintenance or to lower the solvent below its flash point when needed. The casting can be surrounded by insulation to minimize heat loss and keep equipment cabinet temperatures low .

Safety features include a NEMA 7 rated explosion-proof enclosure covering all electrical connections and a snap-action over-temperature protection switch for safe shut-down. The casting body is Teflon® coated to protect the aluminum in case of accidental contact with solvents .

Three Type J thermocouples monitor solvent inlet, solvent outlet, and casting core temperatures for precise process control. The heater operates at near 100% efficiency while reducing the risk of solvent contamination .

Typical applications include semiconductor wet process systems, wafer cleaning equipment, post-etch wet strip, and photoresist removal applications .