The CAS PUR-X 1000 is a replaceable tube circulation heater providing contamination-free heating of liquids and gases for high-purity applications. The innovative design keeps the heated medium completely separate from the heater sheath, with fluid isolated in field-replaceable PFA tubing .

Power range is 1.5 to 4.5 kW with voltage options from 120V to 480V. Maximum operating temperature is 200°C (392°F) with pressure rating of 70 psi (480 kPa). The 0.375" O.D. x 0.031" wall PFA tubing is available in standard or high-purity grades (SEMI F57 compliant) and is 190 inches (15.8 ft) in length .

The robust cast-in aluminum construction (Aluminum 319) is free from welds that could potentially fail, ensuring long life and low maintenance. The PTFE-coated body provides easy cleaning, and the self-draining construction reduces material degradation caused by trapped process fluids. The NEMA 7 explosion-resistant enclosure provides safety in hazardous areas .

Two J or K type thermocouples are included for process control and high-limit protection. Heater dimensions are 4.3" OD x 16.5" H, with weight of 22 lb (9.9 kg). Optional accessories include insulation jacket and PFA 3/8" straight union fittings .

Applications include semiconductor wet process systems, wafer cleaning equipment, heating of photoresist removal solvents, DI water heating for wafer rinsing, air and nitrogen heating for wafer drying, and acid heating .