CAS WR200 and WR300 platen heaters provide a complete turnkey solution for semiconductor wafer processing and engineering experiments. The cast aluminum 356 construction is available in anodized finish or bare machined aluminum with optional add-on features. These heaters achieve a maximum temperature of 752°F (400°C) with exceptional temperature uniformity of ±0.3%. The heating element is cast directly into the platen for optimal heat transfer and durability.

Product Configurations

The WR200 (200mm) platen measures 9.00 inches (228.6mm) outer diameter by 1.25 inches (31.8mm) thick, delivering 1681 watts at 208V to 2241 watts at 240V. The WR300 (300mm) platen measures 13.78 inches (350.0mm) outer diameter by 1.575 inches (40.0mm) thick, delivering 3350 watts at 208V. Both models feature power lead exits on the back non-working surface at center, with additional pre-drilled holes for sensor mounting and installation.

Quality and Installation

Stock anodized cast aluminum platen heaters are ready for installation and ship within one business day. Each unit undergoes ultrasonic cleaning in deionized water and IPA wipe prior to packaging. MGT insulated flexible lead wires provide reliable electrical connections. These heaters are ideal for prototype machine trials, engineering experiments, and temporary repairs until custom heaters can be manufactured.

Applications

Semiconductor processing and research and development applications benefit from the precision temperature control and uniformity of CAS platen heaters. The robust cast-in construction ensures long-term reliability in demanding laboratory and manufacturing environments.