The CAS PUR-Therm gas delivery heater is designed for heating critical carrier gases and process gases while meeting the industry's most stringent purity standards. It provides OEMs and fabricators with a more efficient, accurate method of heating chamber gases without sacrificing purity .

The heater utilizes cast-in component technology to deliver more heat at lower wattages, using less energy to achieve the same Delta-T compared to other heaters. Heated gases are isolated in high-purity 316L seamless stainless steel flow tube, never contacting the heating elements or any other heater components .

Purity specifications meet or exceed industry standards: Particle testing meets SEMI F-70 "Ultra-High Purity" specification; surface roughness meets SEMI F-19 "Ultra-High Purity" spec with average Ra of 2.53 μin (0.064 μm); bend radius complies with SEMI E49 Guidelines for Inert and Reactive Gases; and passivation meets ASTM-967 specifications .

Maximum operating temperature is 300°C (572°F) with standard power of 400 Watts at 208V single phase. The replaceable heating element includes dual-sensor thermocouple for accurate control of operating temperatures and secure over-temp protection. Industry-standard VCR fittings (certified Ultra-High Purity) on tube inlet and outlet ensure compatibility with existing systems .

The compact body dimensions are 3.50" (89 mm) x 3.75" (95 mm). Applications include carrier gas heating, process gas heating, and air and nitrogen heating for wafer drying. PUR-Therm eliminates the messy wires and control mechanisms associated with flexible gasline heaters and can be easily installed into gas cabinets or integrated in-line at any point along the gas stream .